Ultra Precision 3D Optical Profiler

The Ultra Precision 3D Optical Profiler range offers non-contact areal measurement systems that uses coherence correlation interferometry technology. It is able to complete a measurement with over 1 million data points in less than 10 seconds with a resolution of 0.01 nm (0.1 Å).
Non-contact CCI 9150

Talysurf CCI 9150

The Talysurf CCI9150 system advanced production metrology tool has an ultra low noise 1M pixel sensor as standard. It greatly improves signal-to-noise ratio which delivers best in class repeatability and unparalleled surface detail.

It has been designed specifically to meet the most demanding automated production requirements. It is ideally suited to applications in Data Storage, Semiconductor Fabrication and MEMS.
  • 0.1 Å (0.01 nm) Vertical resolution algorithm
  • 0.2 Å (0.02 nm) Measurement noise (real measurement data)
  • > 1,000,000 Data points as standard
  • AlTiC and DLC material compensation available
  • 0.03 Å (0.003 nm) RMS repeatability

Sub-Angstrom resolution

The Talysurf CCI 9150 is invaluable for applications requiring the ultimate in high precision 3D profile analysis. An unparalleled level of performance for non-contact 3D measurement with 0.1 Å Z resolution over the full Z scan range combined with <0.2 Å measurement noise.

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Non-contact CCI 6000

Talysurf CCI 6000

The Talysurf CCI 6000 interferometer is an advanced high resolution metrology tool with a 1M pixel sensor as standard. It delivers best in class repeatability and unparalleled surface detail.

It has been designed for ultra high resolution measurement of many different types of surface requiring sub-micrometrre and sub-nanometre z resolution. It is ideally suited to applications in many different areas including: semiconductor fabrication and MEMS as well as advanced research and optics
  • 0.1 Å (0.01 nm) Vertical resolution algorithm
  • 0.5 Å (0.05 nm) Measurement noise (real measurement data)
  • > 1,000,000 Data points as standard, > 4,000,000 data point system also available

Sub-Angstrom resolution

The Talysurf CCI 6000 is suited for applications requiring the ultimate in high precision 3D profile analysis. An high level of performance for non-contact 3D measurement with 0.1 Å Z resolution over the full Z scan range combined with <0.5 Å measurement noise.

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