Talysurf CCI
The TalySurf CCI is an advanced 3-dimensional non-contact optical metrology tool used for advanced surface characterisation. This instrument has the ability
to offer
a true topographical representation of a surface with 0.01 nm Z resolution over a full scan range plus a 0.4 µm lateral resolution, with over 1,000,000 data points.
The Talysurf CCI comes in a range of forms, the Talysurf CCI 2000 (entry level), the Talysurf CCI 6000 (advanced) and the Talysurf CCI ULN (advanced ultra low noise). This family of products all takes advantage of Taylor Hobson’s patented coherence correlation interferometry (CCI) technology to provide ultra high resolution interferometic measurements for non-contact surface roughness,
step-heights, form, shape, angular and critical dimension results.
Coherence correlation interferometry (CCI) is a multi-functional and flexible 3D metrology technology that can be adapted to measure and characterise a wide range of surface types. Polished, ground, etched, transparent, rough, shiny and multi-dimensional surface types can all be measured and characterised. Accurate surface characterisation can proved critical information that can be related to spects of a manufacturing process. Understanding and monitoring these processes allows research and production to maintain component quality, yields and operational performances.
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Talymap - Powerful Analysis Software
Talysurf CCI data is analysed and displayed by Talymap recognised as one
of the most advanced 3D-analysis software packages available today.
◄ Using an interactive window display, the software presents on-screen instrument control, surface images, plots and data. Available data includes
a
high fidelity 3D image, 3D plots, 2D profiles of 3D data and a wide range
of surface roughness parameters.
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MEMS - Avoid etch/time rate problems
Learn to optimise the production processes. Discover how to adapt to different materials and the relationship between the rate of etch to the width of the slot. Optimise material etch rates, identify errors generated by the etching process.
Avoid time consuming problems.
◄ 100µm deep trench showings etch height errors, X/Y 500µm. Uneven etch
rate leaves trench height errors.
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MEMS - Measure free standing structures
Free-standing structures can be examined to quantify that sacrificial layers
have been correctly removed. The residual stress of an individual component
can be evaluated, residual stress can determine the operational characteristics (resonant frequency, switching voltage, etc.) - all of these factors can affect the performance
of the final device.
◄ MEMS Device – A 2mm long, 5µm high micro-machined silicon diaphragm
used as a sensor to monitor changes in air pressure. Image courtesy of GE Druck Limited.
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MEMS - Evaluate Anchor Points
The Talysurf CCI allows precise structural characterisation of any device for remodelling or the prediction of device performance. The point at which a MEMS device connects to its substrate can be measured for the quality of the clamp.
At these connection points many problems are likely to occur. Including clamping errors, component stress, deformation and signs of energy loss.
◄ Silicon fixed bridge showing point of anchor. St 4.5µm, X/Y 350µm Measure step height, angles, radius of curvature, critical dimensions and roughness of contact areas.
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Textured Steel - Roughness and Tribology
In steel manufacturing processes, surfaces and their properties are as important as the bulk properties of the material. The surface topography has an effect on a wide range of application properties, such as friction, wear, bonding of paints and coatings, visual appearance, corrosion resistance, fatigue behaviour, sealing capacity, electrical and thermal contact resistance. Textured steel has a pattern introduced into the surface helps control these properties.
◄ High accuracy surface metrology is crucial to controlling textured steel surface characteristics and performance, 3.57µm RMS.
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Optical Polishing - High accuracy measurements for process control
Polishing involves the use of free grains usually suspended in a liquid rather than bonded into a wheel as in grinding. It is a process associated with the generation of nominally ideally smooth surfaces.High precision optical components can be made from many materials ranging from glass through to metals. These components are finished with a polishing process in order to meet optical surface finish requirements.
◄ Polished surface with ‘comet tails’ (40nm RMS) generated from a material
that contains hard particle impurities.
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Single Point Diamond Turning - Surface finish of optical components
With surface finish specifications for diamond turned optics frequently reaching nanometric levels, precision metrology is seen as increasingly essential by optics manufacturers. Using Talysurf CCI, it is possible to both characterise and control manufacturing processes with nanometric surface finish tolerances.
◄ Surface roughness measurement of SPDT optical component showing the effects of a machine co-ordinate error on the surface, 4.51nm RMS.
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Semiconductor - Backside wafer process control
The Talysurf CCI 3000 is ideally suitable for a number of wafer processing applications. This instrument will also prove to be a valuable process optimisation tool when surface texture and the measurement of complex structures is important for grinding, etching and lapping wafers. The TalySurf CCI is ideal for both process control and the research and development.
◄ Surface roughness measurement of etched backside wafer, 843nm RMS.
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Semiconductor - Wafer grinding process control
Grinding like lapping can be used to flatten wafers after they have been sliced or is
a process used to reduce the thickness of a silicon wafer after fabrication steps. Grinding is a process that removes material through the use of a rotating grinding wheel.
◄ Surface roughness measurement of ground wafer, 10.3nm RMS.
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Diffractive Optics - Form and dimensional features on moulded optics
Moulded optics such as DVD lenses incorporate features such as diffractive zones, which require ultra-precise dimensional analysis. Talysurf CCI provides high-resolution 3D measurements of either moulds or components, allowing both the tool making and moulding processes to be controlled effectively.
◄ Form measurement of a plastic moulded diffractive lens.
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Material Science - Polishing new materials
Controlling the surface finish of components can prove difficult when working with new or unknown material types. Knowledge of how these materials behave too different machining process can prove critical when nano-metric surface finish specifications need to be met. Taylor Hobson metrology allows you to optimise
your process to meet tight surface specification requirements.
◄ Surface roughness measurement of Zinc Selenide, 11.4nm RMS.
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Medical - Non-contact 3D topography for replacement hip joints
Replacement hip joints transfer very large loads. The hip joints carry the weight of the upper body, and the legs transfer the forces of movement to the torso. These pressures can cause the hip joint to suffer from a gradual wearing process, which will limit its life. It is therefore critical that the roughness of the implant surface be controlled during manufacturing so that the risk of surface breakdown and component failure is reduced to ensure a long implant life.
◄ Simulated scratches and wear marks on a metal ball joint, the valleys are 140nm deep and the fine polishing marks can also be viewed.
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Material Science - Working with polymers
Polymers are very big molecules made of smaller molecules linked together into long, repeating chains. Polymers are used in every day items. The Talysurf CCI
can be used as an aid to surface characterisation for the understanding of various polymer properties: Interfacial adhesion, manufacturing, elastic and strength properties of unidirectional and random laminas. The micro-mechanical and macro-mechanical behaviour of composite materials, stiffness, strength, hydrothermal effects, laminate analysis, viscoelastic and dynamic behaviour.
◄ Scratches in a polymer surface, 7.2µm high.
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Characterising Step Heights?
The TalySurf CCI is an instrument that is used to accurately measure vertical steps. This includes steps on machined metals and glasses, etched surfaces, patterned semiconductor wafers and traceable Step Height Standards.It has been designed to accurately measure steps of up to 400µm in height.This instrument offers excellent repeatability and fast non-destructive measurement with long-term gauge stability and high measurement throughput.
◄ A 23nm Step Height Standard measured to ISO 5436 Type A
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