CCI HD

  • Overview +


    The CCI HD is a non contact 3D Optical Profiler with thin & thick film measurement capability. It uses an innovative, patented correlation algorithm to find the coherence peak and phase position of an interference pattern produced by our precision optical scanning unit. The new CCI HD merges world leading non-contact dimensional measurement capability with advanced thin and thick film technology

    The CCI HD has been designed to offer both types of film thickness measurement in additions to dimensional and roughness capability. Thick film analysis has been used in recent years to study semi-transparent coatings down to about 1.5 microns; the limit is dependent on the refractive index of the materials and the NA of the objective. Thinner coatings have proved more of a challenge.

    It is now possible to study thin film coatings down to 50 nm (also refractive index dependent) by interferometry. This new approach allows the study of properties such as film thickness, interface roughness, pinhole defects and delamination of thin coated surfaces, all from a single measurement.

    • 2048 x 2048 pixel array for large FOV with high resolution
    • 0.1 Angstrom resolution over the entire measurement range
    • 0.3% - 100% Surface reflectivity can be accommodated
    • <0.2 Angstrom RMS repeatability, <0.1% step height repeatability
    • 64-bit Control and analysis software in multi-language

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