Optics Applications - 3D Measurement of MicroLens Arrays

Optics Applications
Form Measurement of Diamond Turned Aspheric Optics	Form Measurement of Fibre-Optic Connectors
Form Measurement of Ground & Polished Aspheric Optics	3D Measurement of MicroLens Arrays
Surface Finish of Polished Optics	Dimensional Measurement of Laser Etalons
Form Measurement of Diffractive Optics	Freeform Optics

3D Measurement of MicroLens Arrays

Overview
Microlens Arrays are a relatively new technology which are now widely used for such applications as Optical Switching, DWDM and Waveguides.

With individual lenses as small as 15um Ø, the measurement of sub-micron form errors and Angstrom-level surface finish creates
a uniquely challenging metrology requirement.

The Talysurf CCI 3000 meets this challenge with it’s world-beating specification. Detailed in the Talysurf links below.

Talysurf CCI Systems
Non-Contact 3D Measurement System using patented Coherence Correlation Interferometer. Resolution 0.1Å, Z-Range 100um, X-Y Measurement Area 7.2mm².
Delivers market-leading surface roughness measurement capability for a wide range
of MEMS components, including optics.

TalyMap 3D Analysis Software
Talymap has been designed specifically for the metrology industry and has many operations supplied; zoom, filtering, levelling by least square line removal, symmetries, rotations, threshold setting and cylindrical, spherical or polynomial form removal and much more. 2D profiles can be extracted and exported to Aspherics Analysis Utility (see below).

Aspherics Analysis Software Utility
In-depth analysis of Aspheric Optics, using Taylor Hobson’s renowned algorithm capability. Form Error & Surface Finish Parameters, SAG Tables and Astigmatism Analysis supplied as standard with PGI Aspherics Systems. Also available is a unique Derived Coefficients module, allowing the aspheric data to be calculated directly from the component.

If you do not see optics metrology solutions directly relevant to your specific requirements, please contact your local Taylor Hobson Sales Office. We have a highly skilled team of Applications Engineers who can create custom systems for this and many other high precision industries.