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Optics sector
Talysurf CCI 3Systems

Taylor Hobson’s new Talysurf CCI is a Non-Contact 3D Measurement System using patented Coherence Correlation Interferometer. CCI technology allows optics users to assess polished surfaces with greater accuracy and repeatability than ever before. Main features & benefits include:
	Resolution 0.1Å, Repeatability 0.03Å
	Allows optical surface structures and features to be analysed in detail. Market-leading stability provides optics users with a unique process monitoring tool.
	Fast measurement & analysis
	3D surface texture, step height and micro dimensional measurement system that gives results in seconds.
	Multi-functional metrology tool
	Many material types can be measured, e.g. Glass, Metal, Polymer, Photo Resist, from rough ground to highly polished state.
	Wide Range of Metrology Parameters
	Talymap 3D Analysis software provides assessment of Surface Texture, Step Height, Critical Dimensions, Form, Angle, Volume, etc.

Talysurf CCI 3000 Specifications
Resolution (max)	Repeatability	Number of Measurement Points
Z 0.01nm (0.1Å) X/Y 0.36µm	Z 3pm (0.03Å) Sq Z 0.1nm (1Å) Step Height	1 Million (1024 x 1024)
Measurement Range/Area	Measurement Time	Component size (max)
Z 100µm X,Y 360 x 360 µm (x50 lens) 1.8 x 1.8 mm (x10 lens)	Typical 10-20 seconds	X,Y 300mm (max)