Hard Disk, MEMS & Semiconductor Applications

Hard Disk, MEMS & Semiconductor Applications
Hard Disc Media (disks)	Laser Etch Measurement
Hard Disk Heads (sliders)	Epitaxial Wafers
Step Height	IC Package Measurement
MEMS & Nanotechnology

Step Height Measurement

Overview
The accurate and repeatable measurement of step height is necessary for many hi-tech applications. Taylor Hobson provide a range of instrument designed to meet the very highest requirements for step height measurement. Covering ranges of step height from sub-nanometer to millimetre with repeatability below 0.1nm.

The products include:

Talysurf CCI 3000A
High speed non-contact 3D metrology system with 10pm (0.01nm) vertical resolution and 0.1nm step height repeatability. For the measurement of step heights up to 100µm.

Talysurf CLI 2000
Scanning 3D profiler combining contact stylus, laser triangulation and chromatic confocal measurement sensors. For the measurement of step heights up to 3mm

Metrology

3D Step Height
Provides the height difference between two planes defined by two areas on a surface. The first area is defined as the reference and the software fits a least squares plane through this area. The second plane is then measured from this. As well as mean step height, maximum height and minimum height, the angle difference is also measured.

2D Step Height
Provides a method of measuring step height for simple geometric shapes such as etched lines or rectangular areas. 2D step height can also be used for measuring thickness where an edge is exposed.

ISO 5436-1 Step Height
When attempting to compare measurements of step height taken on different measurement instruments it is very important to comply to a standard method of measurement. ISO 5436-1 provides an internationally recognised method of measuring step height. The above instruments all support this standard.

For further details contact your local sales representative