Hard Disk, MEMS & Semiconductor Applications

Hard Disk, MEMS & Semiconductor Applications
Hard Disc Media (disks)	Laser Etch Measurement
Hard Disk Heads (sliders)	Epitaxial Wafers
Step Height	IC Package Measurement
MEMS & Nanotechnology

MEMS & Nanotechnology

Overview
Micro Electro-Mechanical Systems are being used today for numerous applications including pressure and acceleration sensors, micro mirror display devices and micro fluidic pumps. MEMS devices extend the fabrication techniques used by the integrated circuit industry to create mechanical elements such as gears, diaphragms and connecting beams. Accurate measurement of all these elements is critical to meet the demand of mass producing low cost high quality MEMS devices.

The products include:

Talysurf CCI Systems
High speed non-contact 3D metrology system measuring 1 million data points in a single measurement of up to 7mm x 7mm area. For the measurement of flatness, roughness, feature size and volume.

Talysurf CLI 2000
Scanning 3D profiler combining contact stylus, laser triangulation and chromatic confocal measurement sensors. Offering 200mm x 200mm maximum scanning area and up to 3mm vertical range. For the measurement of MEMS packaging and macro scale features.

Metrology

Roughness
Accurate measurement of roughness within MEMS devices allows surface interactions to be controlled, whether they are solid to solid interactions as in micro gear systems or solid to liquid as found in micro fluid pumps.

Step Height
monitoring step height of MEMS devices is an important indicator of performance. Along with lateral dimension information step height gives a good approximation of mass which affects the fundamental oscillating frequency of the individual elements in the device.

Lateral Dimensions
lateral dimensions are particularly important when characterising micro gears and fluidic systems. Accurate measurement of volume and surface area as well as critical dimensions such as beam widths all help control the performance of the final device.

For further details contact your local sales representative