Hard Disk, MEMS & Semiconductor Applications - Hard Disk Head (sliders) Measurement

Hard Disk, MEMS & Semiconductor Applications
Hard Disc Media (disks)	Laser Etch Measurement
Hard Disk Heads (sliders)	Epitaxial Wafers
Step Height	IC Package Measurement
MEMS & Nanotechnology

Hard Disk Head (sliders) Measurement

Overview
Current advances in hard disk technology, driven by the demand for higher data densities on smaller disk substrates, has meant that much higher tolerances now have to be maintained on the sliders (HDD heads). Controlling the geometry of the sliders to a very high tolerance allows them to ‘fly’ much closer to the disk surface, reducing the magnetic spacing, which in turn allows for higher data density.

Talysurf CCI 3000A
High speed non-contact 3D metrology system with 10pm (0.01nm) vertical resolution and down to 0.4µm lateral resolution. For the measurement of air bearing surface flatness, step height and PTR.

Metrology

Slider Flatness
A key limiting factor in the data storage density of a hard disk drive is the flying head height. This is affected significantly by the very small curvature of the Air Bearing Surface (ABS) of the slider side that faces the disk. As a result there is an ever increasing need to control the ABS curvature down to the nanometer level and beyond. By measuring the individual parameters of Crown, Cross Curve (Camber) and Twist the sliders can be modified to bring the overall ABS curvature within tolerance.

Pole Tip Recession
Controlling the pole tip recession region of the slider has, for many years, been one of the most critical metrology applications in the hard disk industry. Year on year these PTR features have been reducing in size and requiring ever higher manufacturing tolerances. For these measurements lateral resolution, number of measurement points, vertical resolution and measurement repeatability are paramount.

For further details contact your local sales representative